Repair-, Service Solutions for electromechanical components applied in the semiconductors industries and their related technologies.
OEM services and spare parts support for dedicated equipments
Applied Materials - Novellus - LAM Research - TEL/Eclipse - AG/Steag/OEM Group RTP - Mattson - KLA-Tencor - Prometrix - Nanometrix - Rudolph Tech. - SEZ Group - FSI International - Watkins-Johnson - TLM Laser Therma Wave - ASM - SVG-Thermco
WAFER HANDLING SCARA ROBOTS, PRE‐ALIGNERS & CONTROLLERS
// Brooks Automation
- Vacuum Robot
- Magnatran 7 & Arms
- PRI‐Equipe Robots
- AxM 100‐, 200‐, 300‐, 400 and 500 Series
- FDP 400 and 500 - DBM 240 6/7 and DBM 270 6/7 - WTM 100‐, 400‐ and 500 Series
- Controllers
- ESC‐200‐, 212‐, 218‐ and 228 Series EDC‐2800
- Aligners
- PRE‐100‐, 200‐, 201‐, 300‐, 301 Series
// Kensington Labs.
- Robots
- WHF Series, Multilink Single/Dual Arm Series and Controller 4000 Models
// Genmark Automation
- Robots
- GB 4 / 4-P‐, 7‐, 8 Series
- ASM GB4-17" Units
- Controllers
- LGC, SMC, S08 Series
- Aligners
- Remote‐, Stand Alone and Edge Grip Series
// Logosol Inc.
- Aligners
- LPA Series
HIGH‐FREQUENCY POWER UNITS FOR COATING AND ETCH EQUIPMENT
// Advance Energy Inc.
RFG‐, RFD‐ and RFX Product Line Low Frequency generators (50 ‐ 450kHz) Mid and high Frequency Generators Generators for ICP
// ENI Power
Low Frequency Generators 90…460kHz
High Frequenzy Generators 13.56 MHz
OEM & ACG Models
AUTOMATIC MATCHING NETWORKS (RF‐MATCH)
// RFPP
AM5, AM10, AM20, …
// Applied Materials
P5000 Etch‐, CVD‐ HE- and BW‐EB Match…
// Trazar Corp. (Qualified Repair Center by OEM)
RF-Matches AMU 2‐1, AMU 10‐D, AMU 10‐E
Static Chuck Controller ECC 1-1, ECC 1-1M, ECC 1-4F, ECC 3-2
TEMPERATURE & GAS DELIVERY CONTROL
// Schumacher Corp./Air Products/Merck
- Temperature Control for Chemicals
- ATCS15 & Vapor Guard Systems
- Vacuum TEOS Flow Control
- VMDOT
- Chemical Gas Delivery System
- MDOT
// Fuji Film
- Temperature Control for Chemicals
- TC2000 CH/RM